Programmable solder reflow oven

The SRO-Getter from ATV is designed to seal packages with Kovar caps or optical windows for gyroscopes, microbolometers, and MEMS devices under high vacuum. It can used for R&D and in production lines. The device features top and bottom IR heating, with two independently monitored and controlled heating zones, providing uniform heating up to 450°C, while the sensor or chip temperature remains below 100°C during the getter activation process. The SRO-Getter, designed in response to customer feedback and market demands, is equipped with a special tooling for each package size, enabling precise package/lid alignment. Additionally, a mass spectrometer can be added as an option to the system for residual gas analysis during the sealing process.

Facts & Options
Information Request
Highlights SRO-Getter
  • High vacuum capability
  • Independent temperature control of lid and package
  • Process temperature up to 450°C
  • Package and lid separated during high vacuum getter activation
  • Multiple TC monotoring
Common Applications SRO-Getter
  • Package sealing with high vacuum encapsulation
  • Thermal getter activation
  • MEMS Cap / package lid sealing:
    • Microbolometers
    • IR detectors
    • Gyroscopes
  • Sensors
  • MEMS
  • High Power LED
  • CPV, Laser bar
  • Hybrid Assembly
Technical Data SRO-Getter
depending on system configuration/optionals
  • Dimensions
    • 960 x 720 x 1340mm  (LxWxH)
  • Weight
    • 240kg 
  • Working Height
    • 1028mm +/- 20mm adjustable
  • Heated Area
    • 310 x 239mm
  • Heating Method 
    • 2 arrays of 12 IR lamps in 3 zones each
  • Temperature
    • Process temperature up tp 450°C
  • Vacuum Level
    • 10-6 mbar
Options SRO-Getter
  • Custom substrate fixture
  • Chiller


Programmable solder reflow oven
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Vacuum Reflow | Sintering | Processing | ATV Technologie GmbH
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