SRO i-line
The SRO-i-Line is an ideal choice for high-volume production, offering high throughput with up to three process chambers at a small footprint. Process versability is guaranteed with an installed formic acid line, nitrogen cooling, vacuum in the sub 1mbar range, fast heating, and perfect temperature uniformity across the working area. The systerm is designed to work with heater plates as well as direct heating of the devices. This will give you enormous flexibility and allows you to process complex geometries, like products with embedded cooling channels. The SRO-i-Line can be used as a standalone configuration with Manual Loading (ML) or integration into your automated production line (CB).
- High Throughput
- Short cycle times
- Formic Acid
- Excellent temperature uniformity
- IR Heating
- Oxygen < 1.0 ppm with purified N2
- Small footprint (No footprint change up to 3 Process Chambers)
- IGBT / DBC
- Power Semiconductors
- Sensors
- MEMS Devices
- DIE Attachment
- High Power LED
- Hybrid Assembly
- Flip Chip
- Package Sealing
Dimensions
- 1,825 x 1,740 x 2,800 mm (including status light, 38,8 cm height)
Weight
- Maximum 1,400 kg
Carrier Dimensions
- 410 x 440 mm
Heating
- Array of 18 IR lamps per chamber
Temperature
- Process temperature up to 450°C
Power Connection
- Peak power consumption 65 kW
Vaccum Level
- 10-1 mbar
- Additional Process Chambers
- Flux Management Assembly
- Substrate Fixture
SRO i-line
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